V2EX dichlorosilane

Dichlorosilane

Definition / 释义

二氯硅烷:一种含硅的卤代氢硅烷化合物,化学式 SiHCl。常用作半导体与材料工业中的前驱体气体(如化学气相沉积 CVD),用于制备硅薄膜、硅基涂层等。其具有反应性,遇水易水解并可能放出腐蚀性气体。

Pronunciation / 发音

/daklrosalen/

Examples / 例句

Dichlorosilane is used to make thin silicon films.
二氯硅烷可用于制备薄的硅薄膜。

In semiconductor manufacturing, dichlorosilane can act as a precursor in chemical vapor deposition, but it must be handled carefully because it reacts with moisture.
在半导体制造中,二氯硅烷可作为化学气相沉积的前驱体,但由于它会与水分反应,因此必须谨慎处理。

Etymology / 词源

dichloro- 表示“含两个氯原子(di- ‘两个’ + chloro- ‘氯’)”,silane 指“硅烷类化合物”(与 silicon“硅”相关)。合起来字面意思就是“含两个氯取代的硅烷”。

Related Words / 相关词

Literary Works / 文学与著作中的用例

  • Ullmann’s Encyclopedia of Industrial Chemistry(工业化学百科全书条目中常讨论氯硅烷体系及其工业制备与应用)
  • Kirk-Othmer Encyclopedia of Chemical Technology(化工技术百科中涉及硅烷/氯硅烷前驱体与沉积工艺)
  • Silicon VLSI Technology: Fundamentals, Practice and Modeling(涉及半导体工艺中硅源气体与沉积相关内容,可能出现该术语)
  • 相关期刊文献(如 Journal of The Electrochemical SocietyThin Solid Films 等)常在CVD/外延沉积研究中出现该词
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